@article{oai:ir.kagoshima-u.ac.jp:00010725, author = {阿久根, 忠博 and AKUNE, Tadahiro and 坂元, 渉 and SAKAMOTO, Wataru and 大串, 哲彌 and OGUSHI, Tetsuya and 沼田, 正 and NUMATA, Tadashi}, journal = {鹿児島大学工学部研究報告, The research reports of the Faculty of Engineering, Kagoshima University}, month = {Nov}, note = {A reactive sputtering equipment was designed and constructed to make a superconducting thin film with high superconducting transition temperature Tc. Using this, NbN film with Tc-15K which is Known to be the highest for this material was obtained. In order to cooling down these samples, "Cryomech" refrigerator was used for the first time. It became clear that this refrigerator is quite suitable for the study of materials with high Tc.}, pages = {99--103}, title = {超電導体窒化ニオブ薄膜のクライオメックによる臨界温度の測定}, volume = {19}, year = {1977} }