@article{oai:ir.kagoshima-u.ac.jp:00011051, author = {Katanoda, Hiroshi and 片野田, 洋 and Matsuo, Kazuyasu and 松尾, 一泰}, issue = {4}, journal = {Transactions of the Materials Research Society of Japan}, month = {}, note = {The gas/particle flows of the aerosol deposition method are calculated by the method of computational fluid dynamics (CFD). Two-dimensional nozzles (sonic and supersonic) are used in the CFD model. The effects of the nozzle geometry and stagnation pressure upstream of the nozzle on both gas velocity and particle velocity are investigated. The computational results clarify that the larger particle velocity can be obtained by using a supersonic nozzle instead of using a sonic nozzle. This is because, the process gas is accelerated to a supersonic speed in the diverging part of the supersonic nozzle, causing the particle to reach a higher velocity.}, pages = {1003--1006}, title = {Gasdynamics of Aerosol Deposition Method}, volume = {31}, year = {2006}, yomi = {カタノダ, ヒロシ and マツオ, カズヤス} }