@article{oai:ir.kagoshima-u.ac.jp:00003319, author = {楠元, 芳文 and KUSUMOTO, Yoshihumi and 工藤, 圭司 and KUDOU, Keiji and 中尾, 彰夫 and NAKAO, Akio and 上田, 享 and UEDA, Susumu}, journal = {鹿児島大学理学部紀要, Reports of the Faculty of Science, Kagoshima University}, month = {Dec}, note = {Wet chemical etching is used for making microscopical products like lead frames, printed wiring boards, shadow masks and so on. We have investigated the temporal behavior of etching processes of stainless steel (SUS304TA) pre-treated with ultraviolet-light illumination or one not pre-treated. We have also studied the stirring effects of the etching fluid on the stainless steel samples. All the etching experiments were carried out under the ultrasonication. A synergy effect in the stirring and ultrasonication was observed presumably with an increase of the diffusion rate.}, pages = {1--10}, title = {金属表面のエッチングに関する基礎研究}, volume = {35}, year = {2002} }