@article{oai:ir.kagoshima-u.ac.jp:00004629,
 author = {幡手, 泰雄 and HATATE, Yasuo and 戸井田, 剛 and TOIDA, Go and 上村, 芳三 and UEMURA, Yoshimitsu and 吉澤, 秀和 and YOSHIZAWA, Hidekazu and 小野, 輝生 and ONO, Teruo},
 journal = {鹿児島大学工学部研究報告, The research reports of the Faculty of Engineering, Kagoshima University},
 month = {Sep},
 note = {Adhesion strength is one of the most important aspects of water-soluble photo-resist in photo-fabrication techniques. However, no adequate and convenient method to estimate adhesion strength to metal has been proposed. In this study, we have developed a convenient method to evaluate the adhesion strength of water-soluble photo-resist when such a specimen is immersed only into an aqueous hydrochloric acid solution. A specimen covered with casine after the development treatment was used. The testing solution used was 0.5N aqueous hydrochloric acid at 293K. The effects of preparation
conditions in photo-fabrication process on adhesion strength of photo-resist were studied. It was found from the results of measurements with commercial photo-resists that adhesion strength of casine was stronger than that of PVA.},
 pages = {101--106},
 title = {ウェットエッチングにおける感光性樹脂の密着度評価},
 volume = {36},
 year = {1994}
}