{"created":"2023-07-25T08:06:00.311628+00:00","id":4629,"links":{},"metadata":{"_buckets":{"deposit":"acf1b52b-d593-40b2-a190-0bf4bd49e849"},"_deposit":{"created_by":18,"id":"4629","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"4629"},"status":"published"},"_oai":{"id":"oai:ir.kagoshima-u.ac.jp:00004629","sets":["228:273:5356","35:36"]},"author_link":[],"item_7_biblio_info_5":{"attribute_name":"収録雑誌名","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1994-09","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"106","bibliographicPageStart":"101","bibliographicVolumeNumber":"36","bibliographic_titles":[{"bibliographic_title":"鹿児島大学工学部研究報告","bibliographic_titleLang":"ja"},{"bibliographic_title":"The research reports of the Faculty of Engineering, Kagoshima University","bibliographic_titleLang":"en"}]}]},"item_7_date_6":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"1994-09","subitem_date_issued_type":"Issued"}]},"item_7_description_4":{"attribute_name":"要約(Abstract)","attribute_value_mlt":[{"subitem_description":"Adhesion strength is one of the most important aspects of water-soluble photo-resist in photo-fabrication techniques. However, no adequate and convenient method to estimate adhesion strength to metal has been proposed. In this study, we have developed a convenient method to evaluate the adhesion strength of water-soluble photo-resist when such a specimen is immersed only into an aqueous hydrochloric acid solution. A specimen covered with casine after the development treatment was used. The testing solution used was 0.5N aqueous hydrochloric acid at 293K. The effects of preparation\nconditions in photo-fabrication process on adhesion strength of photo-resist were studied. It was found from the results of measurements with commercial photo-resists that adhesion strength of casine was stronger than that of PVA.","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_7_publisher_23":{"attribute_name":"公開者・出版者","attribute_value_mlt":[{"subitem_publisher":"鹿児島大学","subitem_publisher_language":"ja"},{"subitem_publisher":"Kagoshima University","subitem_publisher_language":"en"}]},"item_7_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0451212X","subitem_source_identifier_type":"PISSN"}]},"item_7_source_id_9":{"attribute_name":"NII書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AN00040363","subitem_source_identifier_type":"NCID"}]},"item_7_subject_15":{"attribute_name":"NDC","attribute_value_mlt":[{"subitem_subject":"540","subitem_subject_scheme":"NDC"}]},"item_7_version_type_14":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"幡手, 泰雄","creatorNameLang":"ja"},{"creatorName":"HATATE, Yasuo","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"戸井田, 剛","creatorNameLang":"ja"},{"creatorName":"TOIDA, Go","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"上村, 芳三","creatorNameLang":"ja"},{"creatorName":"UEMURA, Yoshimitsu","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"吉澤, 秀和","creatorNameLang":"ja"},{"creatorName":"YOSHIZAWA, Hidekazu","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"小野, 輝生","creatorNameLang":"ja"},{"creatorName":"ONO, Teruo","creatorNameLang":"en"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-10-27"}],"displaytype":"detail","filename":"AN00040363_v36_p101-106.pdf","filesize":[{"value":"1.7 MB"}],"format":"application/pdf","mimetype":"application/pdf","url":{"label":"AN00040363_v36_p101-106.pdf","objectType":"fulltext","url":"https://ir.kagoshima-u.ac.jp/record/4629/files/AN00040363_v36_p101-106.pdf"},"version_id":"5675850a-3b68-42e0-9ef8-c6a5fc01e0e2"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"ウェットエッチングにおける感光性樹脂の密着度評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ウェットエッチングにおける感光性樹脂の密着度評価","subitem_title_language":"ja"},{"subitem_title":"Adhesion strength of Photo-resist in Photoetching Process","subitem_title_language":"en"}]},"item_type_id":"7","owner":"18","path":["36","5356"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2015-04-30"},"publish_date":"2015-04-30","publish_status":"0","recid":"4629","relation_version_is_last":true,"title":["ウェットエッチングにおける感光性樹脂の密着度評価"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2024-02-20T04:58:49.191845+00:00"}