{"created":"2023-07-25T08:08:22.126506+00:00","id":7734,"links":{},"metadata":{"_buckets":{"deposit":"ec35af9f-2fbf-4281-a09a-bd971e31d9d9"},"_deposit":{"created_by":18,"id":"7734","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"7734"},"status":"published"},"_oai":{"id":"oai:ir.kagoshima-u.ac.jp:00007734","sets":["228:273:5343","35:36"]},"author_link":[],"item_7_biblio_info_5":{"attribute_name":"収録雑誌名","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1981-09","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"165","bibliographicPageStart":"153","bibliographicVolumeNumber":"23","bibliographic_titles":[{"bibliographic_title":"鹿児島大学工学部研究報告","bibliographic_titleLang":"ja"},{"bibliographic_title":"The research reports of the Faculty of Engineering, Kagoshima University","bibliographic_titleLang":"en"}]}]},"item_7_date_6":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"1981-09","subitem_date_issued_type":"Issued"}]},"item_7_description_4":{"attribute_name":"要約(Abstract)","attribute_value_mlt":[{"subitem_description":"Very pure Nb with good crystallinity thin films have been prepared readily by D.C. magnetron sputtering in a vessel containing liquid nitrogen whose outer wall constitutes a sputtering chamber. This was done while the Bell jar was completely separated from the pumping system with the main valve closed fully and the vessel was acting as a cryo-pump which was full of liquid nitrogen. The sputtering deposition rate of 3000 A/min. was observed and the superconducting and other physical properties of Nb thin films are discussed. The highest ratio (in Japan) of resistance at room temperature to that at 10 K, which shows the purity of metals, was obtained.","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_7_publisher_23":{"attribute_name":"公開者・出版者","attribute_value_mlt":[{"subitem_publisher":"鹿児島大学","subitem_publisher_language":"ja"},{"subitem_publisher":"Kagoshima University","subitem_publisher_language":"en"}]},"item_7_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0451212X","subitem_source_identifier_type":"PISSN"}]},"item_7_source_id_9":{"attribute_name":"NII書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AN00040363","subitem_source_identifier_type":"NCID"}]},"item_7_subject_15":{"attribute_name":"NDC","attribute_value_mlt":[{"subitem_subject":"436","subitem_subject_scheme":"NDC"}]},"item_7_version_type_14":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"KANEKO, Yoshiro","creatorNameLang":"en"},{"creatorName":"金子, 与志郎","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"WATANABE, Takumi","creatorNameLang":"en"},{"creatorName":"渡辺, 琢美","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"OGUSHI, Tetsuya","creatorNameLang":"en"},{"creatorName":"大串, 哲彌","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"NUMATA, Tadashi","creatorNameLang":"en"},{"creatorName":"沼田, 正","creatorNameLang":"ja"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-10-28"}],"displaytype":"detail","filename":"AN00040363_v23_p153-165.pdf","filesize":[{"value":"3.7 MB"}],"format":"application/pdf","mimetype":"application/pdf","url":{"label":"AN00040363_v23_p153-165.pdf","objectType":"fulltext","url":"https://ir.kagoshima-u.ac.jp/record/7734/files/AN00040363_v23_p153-165.pdf"},"version_id":"0a54d28f-4b1b-474b-a290-8f7a204055ed"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Nb Film Produced by D.C. Magnetron Sputtering in Liquid N_2 Vessel","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Nb Film Produced by D.C. Magnetron Sputtering in Liquid N_2 Vessel","subitem_title_language":"en"},{"subitem_title":"液体窒素層内での直流マグネトロンスパッタによるニオブ膜の製作","subitem_title_language":"ja"}]},"item_type_id":"7","owner":"18","path":["36","5343"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2012-03-25"},"publish_date":"2012-03-25","publish_status":"0","recid":"7734","relation_version_is_last":true,"title":["Nb Film Produced by D.C. Magnetron Sputtering in Liquid N_2 Vessel"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2024-02-20T05:01:16.608038+00:00"}