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  1. 掲載誌一覧
  2. 鹿児島大学工学部研究報告
  3. vol.23
  1. 工学部
  2. 工学部・紀要論文

Nb Film Produced by D.C. Magnetron Sputtering in Liquid N_2 Vessel

http://hdl.handle.net/10232/12493
http://hdl.handle.net/10232/12493
a0e5dd63-6004-4809-8fc0-835e047831c1
名前 / ファイル ライセンス アクション
AN00040363_v23_p153-165.pdf AN00040363_v23_p153-165.pdf (3.7 MB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2012-03-25
タイトル
タイトル Nb Film Produced by D.C. Magnetron Sputtering in Liquid N_2 Vessel
別言語のタイトル
その他のタイトル 液体窒素層内での直流マグネトロンスパッタによるニオブ膜の製作
著者 KANEKO, Yoshiro

× KANEKO, Yoshiro

WEKO 83693

KANEKO, Yoshiro

Search repository
WATANABE, Takumi

× WATANABE, Takumi

WEKO 83694

WATANABE, Takumi

Search repository
OGUSHI, Tetsuya

× OGUSHI, Tetsuya

WEKO 83695

OGUSHI, Tetsuya

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NUMATA, Tadashi

× NUMATA, Tadashi

WEKO 83696

NUMATA, Tadashi

Search repository
著者よみ
姓名 カネコ, ヨシロウ
著者よみ
姓名 ワタナベ, タクミ
著者よみ
姓名 オオグシ, テツヤ
著者よみ
姓名 ヌマタ, タダシ
別言語の著者
姓名 金子, 与志郎
別言語の著者
姓名 渡辺, 琢美
別言語の著者
姓名 大串, 哲彌
別言語の著者
姓名 沼田, 正
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ departmental bulletin paper
要約(Abstract)
内容記述タイプ Other
内容記述 Very pure Nb with good crystallinity thin films have been prepared readily by D.C. magnetron sputtering in a vessel containing liquid nitrogen whose outer wall constitutes a sputtering chamber. This was done while the Bell jar was completely separated from the pumping system with the main valve closed fully and the vessel was acting as a cryo-pump which was full of liquid nitrogen. The sputtering deposition rate of 3000 A/min. was observed and the superconducting and other physical properties of Nb thin films are discussed. The highest ratio (in Japan) of resistance at room temperature to that at 10 K, which shows the purity of metals, was obtained.
収録雑誌名 鹿児島大学工学部研究報告

巻 23, p. 153-165
作成日
日付 1981-10-05
ISSN
収録物識別子タイプ ISSN
ISSN 0451212X
NII書誌ID(雑誌)
収録物識別子タイプ NCID
NC ID AN00040363
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
NDC
主題Scheme NDC
主題 436
公開者・出版者
出版者 鹿児島大学
公開者よみ
公開者よみ カゴシマ ダイガク
公開者別名
公開者別名 Kagoshima University
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