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  1. 掲載誌一覧
  2. 鹿児島大学工学部研究報告
  3. vol.36
  1. 工学部
  2. 工学部・紀要論文

ウェットエッチングにおける感光性樹脂の密着度評価

http://hdl.handle.net/10232/12397
http://hdl.handle.net/10232/12397
0002c138-3723-4b8f-9968-718f6d52b535
名前 / ファイル ライセンス アクション
AN00040363_v36_p101-106.pdf AN00040363_v36_p101-106.pdf (1.7 MB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2015-04-30
タイトル
タイトル ウェットエッチングにおける感光性樹脂の密着度評価
タイトル
タイトル言語 en
タイトル Adhesion strength of Photo-resist in Photoetching Process
タイトルよみ
タイトルよみ ウェット エッチング ニオケル カンコウセイ ジュシ ノ ミッチャクド ヒョウカ
著者 幡手, 泰雄

× 幡手, 泰雄

WEKO 2308
NRID 1000000038051

幡手, 泰雄

Search repository
戸井田, 剛

× 戸井田, 剛

WEKO 81995

戸井田, 剛

Search repository
上村, 芳三

× 上村, 芳三

WEKO 2307
NRID 1000060160222

上村, 芳三

Search repository
吉澤, 秀和

× 吉澤, 秀和

WEKO 81996

吉澤, 秀和

Search repository
小野, 輝生

× 小野, 輝生

WEKO 81997

小野, 輝生

Search repository
著者よみ
姓名 ハタテ, ヤスオ
著者よみ
姓名 トイダ, ゴウ
著者よみ
姓名 ウエムラ, ヨシミツ
著者よみ
姓名 ヨシザワ, ヒデカズ
著者よみ
姓名 オノ, テルオ
別言語の著者
姓名 HATATE, Yasuo
別言語の著者
姓名 TOIDA, Go
別言語の著者
姓名 UEMURA, Yoshimitsu
別言語の著者
姓名 YOSHIZAWA, Hidekazu
別言語の著者
姓名 ONO, Teruo
言語
言語 jpn
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ departmental bulletin paper
要約(Abstract)
内容記述タイプ Other
内容記述 Adhesion strength is one of the most important aspects of water-soluble photo-resist in photo-fabrication techniques. However, no adequate and convenient method to estimate adhesion strength to metal has been proposed. In this study, we have developed a convenient method to evaluate the adhesion strength of water-soluble photo-resist when such a specimen is immersed only into an aqueous hydrochloric acid solution. A specimen covered with casine after the development treatment was used. The testing solution used was 0.5N aqueous hydrochloric acid at 293K. The effects of preparation
conditions in photo-fabrication process on adhesion strength of photo-resist were studied. It was found from the results of measurements with commercial photo-resists that adhesion strength of casine was stronger than that of PVA.
収録雑誌名 鹿児島大学工学部研究報告

巻 36, p. 101-106
作成日
日付 1994-09-30
ISSN
収録物識別子タイプ ISSN
ISSN 0451212X
NII書誌ID(雑誌)
収録物識別子タイプ NCID
NC ID AN00040363
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
NDC
主題Scheme NDC
主題 540
公開者・出版者
出版者 鹿児島大学
公開者よみ
公開者よみ カゴシマ ダイガク
公開者別名
公開者別名 Kagoshima University
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