{"_buckets": {"deposit": "acf1b52b-d593-40b2-a190-0bf4bd49e849"}, "_deposit": {"created_by": 3, "id": "4629", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "4629"}, "status": "published"}, "_oai": {"id": "oai:ir.kagoshima-u.ac.jp:00004629", "sets": ["5356", "36"]}, "author_link": ["81998", "81996", "81999", "82007", "82004", "82006", "81995", "82002", "81997", "82000", "82003", "2308", "82001", "2307", "82005"], "item_7_alternative_title_19": {"attribute_name": "タイトルよみ", "attribute_value_mlt": [{"subitem_alternative_title": "ウェット エッチング ニオケル カンコウセイ ジュシ ノ ミッチャクド ヒョウカ"}]}, "item_7_biblio_info_5": {"attribute_name": "収録雑誌名", "attribute_value_mlt": [{"bibliographicPageEnd": "106", "bibliographicPageStart": "101", "bibliographicVolumeNumber": "36", "bibliographic_titles": [{"bibliographic_title": "鹿児島大学工学部研究報告"}]}]}, "item_7_date_6": {"attribute_name": "作成日", "attribute_value_mlt": [{"subitem_date_issued_datetime": "1994-09-30"}]}, "item_7_description_4": {"attribute_name": "要約(Abstract)", "attribute_value_mlt": [{"subitem_description": "Adhesion strength is one of the most important aspects of water-soluble photo-resist in photo-fabrication techniques. However, no adequate and convenient method to estimate adhesion strength to metal has been proposed. In this study, we have developed a convenient method to evaluate the adhesion strength of water-soluble photo-resist when such a specimen is immersed only into an aqueous hydrochloric acid solution. A specimen covered with casine after the development treatment was used. The testing solution used was 0.5N aqueous hydrochloric acid at 293K. The effects of preparation\nconditions in photo-fabrication process on adhesion strength of photo-resist were studied. It was found from the results of measurements with commercial photo-resists that adhesion strength of casine was stronger than that of PVA.", "subitem_description_type": "Other"}]}, "item_7_full_name_2": {"attribute_name": "著者よみ", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "81998", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "ハタテ, ヤスオ"}]}, {"nameIdentifiers": [{"nameIdentifier": "81999", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "トイダ, ゴウ"}]}, {"nameIdentifiers": [{"nameIdentifier": "82000", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "ウエムラ, ヨシミツ"}]}, {"nameIdentifiers": [{"nameIdentifier": "82001", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "ヨシザワ, ヒデカズ"}]}, {"nameIdentifiers": [{"nameIdentifier": "82002", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "オノ, テルオ"}]}]}, "item_7_full_name_3": {"attribute_name": "別言語の著者", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "82003", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "HATATE, Yasuo"}]}, {"nameIdentifiers": [{"nameIdentifier": "82004", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "TOIDA, Go"}]}, {"nameIdentifiers": [{"nameIdentifier": "82005", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "UEMURA, Yoshimitsu"}]}, {"nameIdentifiers": [{"nameIdentifier": "82006", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "YOSHIZAWA, Hidekazu"}]}, {"nameIdentifiers": [{"nameIdentifier": "82007", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "ONO, Teruo"}]}]}, "item_7_publisher_23": {"attribute_name": "公開者・出版者", "attribute_value_mlt": [{"subitem_publisher": "鹿児島大学"}]}, "item_7_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0451212X", "subitem_source_identifier_type": "ISSN"}]}, "item_7_source_id_9": {"attribute_name": "NII書誌ID", "attribute_value_mlt": [{"subitem_source_identifier": "AN00040363", "subitem_source_identifier_type": "NCID"}]}, "item_7_subject_15": {"attribute_name": "NDC", "attribute_value_mlt": [{"subitem_subject": "540", "subitem_subject_scheme": "NDC"}]}, "item_7_text_24": {"attribute_name": "公開者よみ", "attribute_value_mlt": [{"subitem_text_value": "カゴシマ ダイガク"}]}, "item_7_text_25": {"attribute_name": "公開者別名", "attribute_value_mlt": [{"subitem_text_value": "Kagoshima University"}]}, "item_7_text_30": {"attribute_name": "NIIタイプ", "attribute_value_mlt": [{"subitem_text_value": "Departmental Bulletin Paper"}]}, "item_7_version_type_14": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "幡手, 泰雄"}], "nameIdentifiers": [{"nameIdentifier": "2308", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "1000000038051", "nameIdentifierScheme": "NRID", "nameIdentifierURI": " "}]}, {"creatorNames": [{"creatorName": "戸井田, 剛"}], "nameIdentifiers": [{"nameIdentifier": "81995", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "上村, 芳三"}], "nameIdentifiers": [{"nameIdentifier": "2307", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "1000060160222", "nameIdentifierScheme": "NRID", "nameIdentifierURI": " "}]}, {"creatorNames": [{"creatorName": "吉澤, 秀和"}], "nameIdentifiers": [{"nameIdentifier": "81996", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "小野, 輝生"}], "nameIdentifiers": [{"nameIdentifier": "81997", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2016-10-27"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "AN00040363_v36_p101-106.pdf", "filesize": [{"value": "1.7 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 1700000.0, "url": {"label": "AN00040363_v36_p101-106.pdf", "url": "https://ir.kagoshima-u.ac.jp/record/4629/files/AN00040363_v36_p101-106.pdf"}, "version_id": "5675850a-3b68-42e0-9ef8-c6a5fc01e0e2"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "ウェットエッチングにおける感光性樹脂の密着度評価", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "ウェットエッチングにおける感光性樹脂の密着度評価"}, {"subitem_title": "Adhesion strength of Photo-resist in Photoetching Process", "subitem_title_language": "en"}]}, "item_type_id": "7", "owner": "3", "path": ["36", "5356"], "permalink_uri": "http://hdl.handle.net/10232/12397", "pubdate": {"attribute_name": "公開日", "attribute_value": "2015-04-30"}, "publish_date": "2015-04-30", "publish_status": "0", "recid": "4629", "relation": {}, "relation_version_is_last": true, "title": ["ウェットエッチングにおける感光性樹脂の密着度評価"], "weko_shared_id": 3}