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ウェットエッチングにおける感光性樹脂の密着度評価
http://hdl.handle.net/10232/12397
http://hdl.handle.net/10232/123970002c138-3723-4b8f-9968-718f6d52b535
名前 / ファイル | ライセンス | アクション |
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2015-04-30 | |||||
タイトル | ||||||
タイトル | ウェットエッチングにおける感光性樹脂の密着度評価 | |||||
タイトル | ||||||
タイトル言語 | en | |||||
タイトル | Adhesion strength of Photo-resist in Photoetching Process | |||||
タイトルよみ | ||||||
タイトルよみ | ウェット エッチング ニオケル カンコウセイ ジュシ ノ ミッチャクド ヒョウカ | |||||
著者 |
幡手, 泰雄
× 幡手, 泰雄× 戸井田, 剛× 上村, 芳三× 吉澤, 秀和× 小野, 輝生 |
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著者よみ | ||||||
姓名 | ハタテ, ヤスオ | |||||
著者よみ | ||||||
姓名 | トイダ, ゴウ | |||||
著者よみ | ||||||
姓名 | ウエムラ, ヨシミツ | |||||
著者よみ | ||||||
姓名 | ヨシザワ, ヒデカズ | |||||
著者よみ | ||||||
姓名 | オノ, テルオ | |||||
別言語の著者 | ||||||
姓名 | HATATE, Yasuo | |||||
別言語の著者 | ||||||
姓名 | TOIDA, Go | |||||
別言語の著者 | ||||||
姓名 | UEMURA, Yoshimitsu | |||||
別言語の著者 | ||||||
姓名 | YOSHIZAWA, Hidekazu | |||||
別言語の著者 | ||||||
姓名 | ONO, Teruo | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
要約(Abstract) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Adhesion strength is one of the most important aspects of water-soluble photo-resist in photo-fabrication techniques. However, no adequate and convenient method to estimate adhesion strength to metal has been proposed. In this study, we have developed a convenient method to evaluate the adhesion strength of water-soluble photo-resist when such a specimen is immersed only into an aqueous hydrochloric acid solution. A specimen covered with casine after the development treatment was used. The testing solution used was 0.5N aqueous hydrochloric acid at 293K. The effects of preparation conditions in photo-fabrication process on adhesion strength of photo-resist were studied. It was found from the results of measurements with commercial photo-resists that adhesion strength of casine was stronger than that of PVA. |
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収録雑誌名 |
鹿児島大学工学部研究報告 巻 36, p. 101-106 |
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作成日 | ||||||
日付 | 1994-09-30 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
ISSN | 0451212X | |||||
NII書誌ID(雑誌) | ||||||
収録物識別子タイプ | NCID | |||||
NC ID | AN00040363 | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
NDC | ||||||
主題Scheme | NDC | |||||
主題 | 540 | |||||
公開者・出版者 | ||||||
出版者 | 鹿児島大学 | |||||
公開者よみ | ||||||
公開者よみ | カゴシマ ダイガク | |||||
公開者別名 | ||||||
公開者別名 | Kagoshima University |